FFKM O-rings for Semiconductors
These are new, amber, translucent products targeted specifically for deposition process application.
Welcome to learning about FFKM O-rings for Semiconductors
Sunraz™ FFKM O-rings for semiconductors are the industry standard in semiconductor manufacturing. They offer exceptional resistance to extreme temperatures up to 315°C, harsh chemicals, and reactive plasmas. They have excellent thermal stability, very low outgassing, and outstanding elastic recovery and mechanical strength, making them suitable for both static and dynamic sealing applications.
Features and Benefits
FFKM O-rings for semiconductors have very low outgassing properties, a low erosion rate and ultra-low particle generation in oxygen- and fluorine-based plasmas. They also have excellent resistance to dry process chemistry, excellent elastic recovery and low compression set properties.
Suggested Applications
- Bonded gate valves/slit valve door seals
- Gas inlet/orifice seals
- Isolation valve seals
- Chamber lid seals
- Semiconductors
For more applications for FFKM O-rings for semiconductors, please contact us.
Sunraz™ Ultra-pure, Low Outgassing FFKM
Equivalent to Kalrez® 8100, 9100, 9300| Physical Properties | Test Method | UP650D | UP750D | UP800W | UP800W |
|---|---|---|---|---|---|
| Color | ASTM D2244 | Transparent dark amber | Transparent dark amber | Cream White | White |
| Hardness Shore A | ASTM D2240 | 65 | 74 | 80 | 82 |
| 100% Modulus (MPa) | ASTM D412 | 3.3 | 6.2 | 4.7 | 8 |
| Tensile Strength at Break (MPa) | ASTM D395B | 12.9 | 17 | 11.6 | 12.8 |
| Elongation at Break (%) | ASTM D412 | 210 | 250 | 300 | 180 |
| Compression set (%, 70 hr @ 200 °C) | ASTM D395B | 12.5 | 17 | 24.8 | 34 |
| Max Continuous Working Temp | - | 315 | 315 | 315 | 280 |
Sunraz™ Chemical Resistant Grade FFKM
Equivalent to Kalrez® 6375, Chemraz® 505| Physical Properties | Test Method | CR750B | CR750W | CR756B | CR800B | CR900B | CR600W |
|---|---|---|---|---|---|---|---|
| Color | ASTM D2244 | Black | White | Black | Black | Black | White |
| Hardness Shore A | ASTM D2240 | 75 | 74 | 76 | 80 | 90 | 60 |
| 100% Modulus (MPa) | ASTM D412 | 17.5 | 4.5 | 11.5 | 11 | 17 | 4.5 |
| Tensile Strength at Break (MPa) | ASTM D395B | 17.5 | 10 | 15.9 | 18 | 21 | 14 |
| Elongation at Break (%) | ASTM D412 | 177 | 190 | 129 | 150 | 125 | 190 |
| Compression set (%, 70 hr @ 200 °C) | ASTM D395B | 22 | 25 | 20 | 24 | 30 | 18.8 |
| Max Continuous Working Temp | - | 230 | 250 | 175 | 250 | 250 | 250 |
Sunraz™ High Temperature Grade FFKM
Equivalent to Kalrez® 4079| Physical Properties | Test Method | HT750B | HT750W | HT900B | HT600W |
|---|---|---|---|---|---|
| Color | ASTM D2244 | Black | Cream White | Black | White |
| Hardness Shore A | ASTM D2240 | 75 | 74 | 90 | 60 |
| 100% Modulus (MPa) | ASTM D412 | 6 | 4.5 | 13 | 3.2 |
| Tensile Strength at Break (MPa) | ASTM D395B | 14 | 7.5 | 16.5 | 10 |
| Elongation at Break (%) | ASTM D412 | 260 | 260 | 110 | 190 |
| Compression set (%, 70 hr @ 200 °C) | ASTM D395B | 23 | 24 | 27 | 11 |
| Max Continuous Working Temp | - | 330 | 330 | 330 | 330 |
Sunraz™ FDA Standard FFKM
Equivalent to Kalrez® 6375| Physical Properties | Test Method | FDA800B | FDA800W |
|---|---|---|---|
| Color | ASTM D2244 | Black | White |
| Hardness Shore A | ASTM D2240 | 75 | 75 |
| 100% Modulus (MPa) | ASTM D412 | 16 | 6 |
| Tensile Strength at Break (MPa) | ASTM D395B | 17.6 | 12 |
| Elongation at Break (%) | ASTM D412 | 180 | 210 |
| Compression set (%, 70 hr @ 200 °C) | ASTM D395B | 17 | 27 |
| Max Continuous Working Temp | - | 250 | 250 |
Sunraz™ Low Compression Set, High Temperature FFKM
Equivalent to Kalrez® 7075| Physical Properties | Test Method | LC700 | LC701 |
|---|---|---|---|
| Color | ASTM D2244 | Black | Black |
| Hardness Shore A | ASTM D2240 | 75 | 75 |
| 100% Modulus (MPa) | ASTM D412 | 10.5 | 8.9 |
| Tensile Strength at Break (MPa) | ASTM D395B | 15 | 12.5 |
| Elongation at Break (%) | ASTM D412 | 180 | 181 |
| Compression set (%, 70 hr @ 200 °C) | ASTM D395B | 15 | 12.5 |
| Max Continuous Working Temp | - | 250 | 330 |
